| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2019-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8db8a686f8ba663df0b117b048671b94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_466f7dce6864d6255f385492727f5626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41f6103972a0d4dfc8a00a1bdd165942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1f72282d5b635a8f582b3df0aae8b7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_983e04fd21f7236969e90b4c0113ad50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9814e6d1f7530123463aa481baf639f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaa2881a8400e5ad2d6f5bc9cbeee040
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18864663eb4f3fb9804c2971096e1dd2 |
| publicationDate |
2020-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020166136-A1 |
| titleOfInvention |
Substrate drying method and substrate processing device |
| abstract |
A set concentration range that indicates the range of concentration of a sublimable substance that is set at least on the basis of the height of a pattern is checked. A starting solution that contains the sublimable substance and a solvent is stored in a starting solution tank. A diluted solution containing a solvent and having a concentration of the sublimable substance that is lower than the concentration of the sublimable substance in the starting solution is mixed with the starting solution outside the starting solution tank to create a pre-dry process liquid in which the concentration of the sublimable substance is within the set concentration range. A solidified film that contains the sublimable substance is formed on a surface of a substrate. The solidified film is sublimated to remove the solidified film from the surface of the substrate. |
| priorityDate |
2019-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |