http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002045805-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 |
| filingDate | 2000-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88a9010a6223da4f5b8fcb11af273e6d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c136d031f7620ec1b6e003e0a9869673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75e99b6d8465689cf332fbbad5859f51 |
| publicationDate | 2002-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002045805-A |
| titleOfInvention | Substrate cleaning method and substrate cleaning apparatus |
| abstract | (57) [Summary] [PROBLEMS] To enable uniform and stable substrate cleaning, and at the same time, to save resources and reduce waste. SOLUTION: When cleaning a substrate using an aqueous solution of ammonium fluoride or a mixed solution of an aqueous solution of ammonium fluoride and hydrofluoric acid as a cleaning liquid, the cleaning time of the substrate is changed as the usage time of the cleaning liquid elapses. At this time, a cleaning time corresponding to the elapsed time is calculated based on the measurement data, and is controlled. Alternatively, the component concentration in the cleaning liquid may be detected, and the cleaning time of the substrate may be changed according to the obtained result. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020166136-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020136355-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7265879-B2 |
| priorityDate | 2000-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.