http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018012174-A1

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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11147c4bacf2b61803909e1762156a7e
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publicationDate 2018-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018012174-A1
titleOfInvention Polishing composition, method for producing polishing composition, and polishing method
abstract The present invention provides a polishing composition which is capable of polishing an object to be polished, with high polishing speed, and few scratches (defects). The present invention relates to a polishing composition which includes silica and a dispersion medium, wherein the relaxation speed ratio (R 2sp ) obtained by formula 1 (with the caveat that, R (silica) represents the reciprocal (in millisecond units) of the relaxation time of the silica, and R( medium ) represents the reciprocal (in millisecond units) of the relaxation time of the dispersion medium), as measured using pulse nuclear magnetic resonance (NMR), is in the range of 1.60-4.20 inclusive.
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