| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_85f070ba558aa277858c69f83c2737ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65b84ff041220401e8d34fc853773c5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_16fcce1aa3a5379cdd347be29b0a7487
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce96755929f529765ab756d6e8cc822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86f48df5b7998712cb99986e19c556d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97035167e0aff1cb6cdd27c83d29745 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate |
2012-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a48dc0278cfe5a02a74a3f4421d4f798
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40bc188a601e7e700cd3951cac36a327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff255847ecde7e3d3e2c7431a85d253c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a2c64133ddffc1a4017342e0e1d47cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2c9aad6a8b4d2ad74a02832b11bd279
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c14863a8d0fd4910baef60aff6fdeb6 |
| publicationDate |
2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012133257-A1 |
| titleOfInvention |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device |
| abstract |
A pattern forming method, includes: (i) a step of forming a film from an actinic ray-sensitive or radiation-sensitive resin composition containing (P) a resin having (a1) a repeating unit capable of decomposing by an action of an acid to produce a carboxyl group, represented by the following formula (I) as defined in the specification and (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; (ii) a step of exposing the film; and (iii) a step of performing a development by using a developer containing an organic solvent to form a negative pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9989850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10114286-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10095113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10514603-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11548961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10365561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1027107-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9581908-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11073763-B2 |
| priorityDate |
2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |