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publicationDate 2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2006038351-A1
titleOfInvention Crystalline semiconductor film and method for manufacturing the same
abstract An island-shaped crystalline semiconductor film is provided with an upper plane (1) and an inclined side plane (2), and the upper plane (1) and the inclined side plane (2) are connected by a curved plane (3). Both an average grain diameter of a crystal grain of a main body part (11) having the upper plane (1) and an average grain diameter of a crystal grain of an edge part (12) having the inclined side plane (2) exceed 0.2μm.
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