Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0cb5e0cea1e7cf5a9572d9ca41c82206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ae04e02e88957ebb5589d3caa49e1d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02686 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02672 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78675 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757 |
filingDate |
2005-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c61abfdcbb9d622db3eccf947d098a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee5efe285def2454a33ac8004e14d7de |
publicationDate |
2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2006038351-A1 |
titleOfInvention |
Crystalline semiconductor film and method for manufacturing the same |
abstract |
An island-shaped crystalline semiconductor film is provided with an upper plane (1) and an inclined side plane (2), and the upper plane (1) and the inclined side plane (2) are connected by a curved plane (3). Both an average grain diameter of a crystal grain of a main body part (11) having the upper plane (1) and an average grain diameter of a crystal grain of an edge part (12) having the inclined side plane (2) exceed 0.2μm. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010528163-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008166724-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8853782-B2 |
priorityDate |
2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |