| abstract |
The invention relates to an arrangement (1) consisting of a zinc oxide film (2) applied to the surface (4) of a substrate (3), said arrangement comprising a plurality of zinc oxide monocrystals respectively having a [100] lattice line which is oriented essentially parallel to a normal (5) of the substrate surface. The arrangement is characterised in that the zinc oxide monocrystals respectively have a [001] lattice line which is essentially perpendicular to the normal of the substrate surface, and the [001] lattice lines of the zinc oxide monocrystals are essentially parallel to each other. According to the invention, the IBAD (Ion Beam Assisted Deposition) method is used to produce one such arrangement. In this way, zinc oxide or a precursor of the zinc oxide is removed, especially sputtered by a target, especially a sputtering target, for the deposition, and during the deposition, an ion beam is obliquely directed towards the surface of the substrate at a pre-determined angle of incidence in relation to the normal of the substrate surface. The resulting zinc oxide film is biaxially textured. When the inventive arrangement is in the form of a bulk acoustic wave resonator (BAW resonator), the zinc oxide film is excited in such a way that thickness shear vibrations are generated as a result of the texturing. The resonator is used as the transducer of a biosensor. |