| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-46 |
| filingDate |
1999-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d99d5a4b5eadcc1b5c1f83d823a37189
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22fc3136a91c5c14e84af7b617f4db00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d00f81d72b64316d94bccd73f8c44cc2 |
| publicationDate |
2001-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19932444-C1 |
| titleOfInvention |
Process for producing a textured layer of oxidic material on a substrate and use of the process |
| abstract |
The method can be used to produce a textured layer (10) from an oxidic material on a substrate (9) by sputtering off a corresponding sputtering target (7) by means of sputtering ions (5a) Substrate (9) is directed at a predetermined angle (=). Sputter ions (11) scattered back from the sputtering target (7) are to be at least partially masked out with regard to hitting the substrate (9). The method is preferably used for the deposition of a textured intermediate layer on which a cover layer made of an oxide high-T c superconductor material is to be applied. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7147931-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7147932-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02103076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008016257-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008016257-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005005800-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10128660-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10131232-C1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004067797-A1 |
| priorityDate |
1999-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |