| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_347be5276f3a05f06e0f6291f6a06525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f99c9a1a49718b427374e996bfd0a06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_715b88847b98f9ff3496076588b3f39b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-113 |
| filingDate |
2006-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c8be6c74cbbf2655f68241f4299ec91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3badfd24816750982a2a0e7ef24a4201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_950807fea763fe3c0a75cc4f26796bc9 |
| publicationDate |
2006-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006103134-A1 |
| titleOfInvention |
Method for producing a polycrystalline ceramic film on a substrate, capacitor structure having a ceramic film and use of said capacitor structure |
| abstract |
The invention concerns a method for producing a polycrystalline ceramic film on a substrate. Said method consists in: a) preparing the substrate and its surface, as well as a source of ceramic particles for the ceramic film, then b) producing a stream of ceramic particles from the source of ceramic particles towards the surface of the substrate, enabling the particles to be deposited on the surface of the substrate, thus forming the ceramic film. The method is characterized in that at least one screen is placed between the substrate surface and the source of ceramic particles and is designed to adjust an average angle of incidence of the ceramic particles relative to a normal of the substrate surface, so that they are deposited with a preferential orientation on the substrate surface. Said method enables a thin-film resonator which can be activated to produce thickness shearing vibrations to be produced. Said capacitor structure is used as piezoelectric resonator to detect a substance in a fluid, in particular in a liquid (for example, as a biosensor). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8491957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104379795-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020972-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9567666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007085549-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007085549-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10553780-B2 |
| priorityDate |
2005-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |