| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb9eda39abe9ae017bbe6a8fd63bc337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2003-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e71f96a1316e99dd0373f03e50decaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e1260bb9845ae7aa6a011167e4ad9db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33f6539c56ac9b74659b8b075cb9804f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2997791b8c146ae447ccd41750448684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da619a694a3e306b1b63d6e02b3abe72 |
| publicationDate |
2004-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004029719-A1 |
| titleOfInvention |
193nm resist |
| abstract |
Acid-catalyzed positive resist compositions which are imageable with 193nm radiation and/or possibly other radiation and are developable to form resist structures of improved development characteristics and improved etch resistance are enabled by the use of resist compositions containing imaging polymer component comprising an acid-sensitive polymer having a monomeric unit with a pendant group containing a remote acid labile moiety. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011068648-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011026608-A |
| priorityDate |
2002-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |