http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9966297-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4e3691f40afd3ec555105cc14d49797
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2203-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2301-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2220-1808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2220-1858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2201-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2433-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2220-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J133-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-1006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-0296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J133-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate 2014-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13ff52de426ff6fb22a40adb0fe093d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68a04e9ae8833a1556b3e5cdb443d5c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d3d8a1eec801b13454fe4b02135fe77
publicationDate 2018-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9966297-B2
titleOfInvention Semiconductor wafer protective film and method of manufacturing semiconductor device
abstract According to the present invention, there is provided a semiconductor wafer protective film including a substrate layer (A) and an adhesive layer (C) formed on the substrate layer (A), in which the substrate layer (A) includes polymer, and a solubility parameter of the polymer determined by a Van Krevelen method is equal to or greater than 9.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021210440-A1
priorityDate 2013-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005031861-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05148462-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7514143-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014322474-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012114938-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007141330-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012058336-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011224593-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013289225-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005053998-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012273975-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012184369-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011228502-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010258426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008038540-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014261978-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004043760-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010255299-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0532946-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012175045-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7910206-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014130969-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013220532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009177033-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014154450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012144616-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015348819-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012028416-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014154868-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003338475-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6510
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425742778
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415761363
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87317671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1017
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405755
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408511568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422091
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405462
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID80994
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409069
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058043
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407297464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414874191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396167
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8755
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395984
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ9ZU11
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406916
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122409
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755945
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405535
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415718694
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7354
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8496
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11443
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453344012
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7343
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414885931
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12713
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084433
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8172
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77921
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10130166
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226589746
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13835
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409896
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419476441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411505
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226432403
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226528974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405556
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411490
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID240
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2266
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415817154
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19982943
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415949513
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226407772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7187
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396824
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8195
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405542
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21585042
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12979
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8177
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226620811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510012
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226963247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405578
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76969
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7836
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452430613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407460699
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID80995
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92667
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID115712
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415834440
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID350453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451390370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID174
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393282
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19814962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414871923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226442690
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409154811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87812107
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12736
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419528099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226408699
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92938
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408458779
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396058
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411174
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226586441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423510
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417430547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415713017
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21902658
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415771613
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415771612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425966257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450356987
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID228129600
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415822230
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21902652
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406179
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413754
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405950
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87139117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7274
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422483
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410438449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423124
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405444
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421327449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID196
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393570
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13360
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405436
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405787
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90571
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430920266

Total number of triples: 238.