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Object |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6af9a57049d2d91c036d4f5ab49154cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53252
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252 |
| classificationCPCInventive |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02244 |
| classificationIPCInventive |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate |
2016-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_009d82d4c474cd9c9e3092b9e126be12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed657773cafb60fb754dba2e88c2f139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c874925996eaa61e4eec2794de64104d |
| publicationDate |
2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9853115-B2 |
| titleOfInvention |
Hybrid source and drain contact formation using metal liner and metal insulator semiconductor contacts |
| abstract |
An electrical device including a first semiconductor device having a silicon and germanium containing source and drain region, and a second semiconductor device having a silicon containing source and drain region. A first device contact to at least one of said silicon and germanium containing source and drain region of the first semiconductor device including a metal liner of an aluminum titanium and silicon alloy and a first tungsten fill. A second device contact is in contact with at least one of the silicon containing source and drain region of the second semiconductor device including a material stack of a titanium oxide layer and a titanium layer. The second device contact may further include a second tungsten fill. |
| priorityDate |
2015-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |