http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9798233-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2014-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb879aea3b3db1e02cfb7ae1dff39411 |
| publicationDate | 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9798233-B2 |
| titleOfInvention | Radiation-sensitive resin composition and electronic device |
| abstract | A radiation-sensitive resin composition containing an alicyclic olefin polymer which has an acidic group (A), a sulfonium salt-based photoacid generator (B) which is represented by the following general formula (1), and a cross-linking agent (C) is provided. n n n n n n n n n n (In the above general formula (1), R 1 , R 2 , and R 3 respectively independently are a C 6 to C 30 aryl group, C 4 to C 30 heterocyclic group, C 1 to C 30 alkyl group, C 2 to C 30 alkenyl group, or C 2 to C 30 alkynyl group, the groups being optionally substituted, and “a” is an integer of 1 to 5.) |
| priorityDate | 2013-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 773.