| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-12 |
| filingDate |
2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06a3a67c99a2e1549301923f32bc5543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfec26b46da1036ea3f18a5d7c4298c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a6a423635488c986c05b8a9dd511d36 |
| publicationDate |
2016-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9365802-B2 |
| titleOfInvention |
Cleaning liquid for semiconductor device substrates and method of cleaning substrate for semiconductor devices |
| abstract |
The invention relates to a cleaning liquid for semiconductor device substrates comprising the following components (A) to (D) and a method of cleaning semiconductor device substrates:n (A) at least either one of a polycarboxylic acid and a hydroxycarboxylic acid; (B) a sulfonic acid type anionic surfactant; (C) a carboxylic acid type anionic surfactant; and (D) water. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11162057-B2 |
| priorityDate |
2010-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |