http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9150758-B2

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filingDate 2012-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73bc6c1e7946d5246f3c93d9b24c5b98
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publicationDate 2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9150758-B2
titleOfInvention Polishing composition, polishing method using same, and method for producing semiconductor device
abstract The polishing composition of the present invention contains an oxidizing agent and a scratch-reducing agent represented by general formula (1) or (2) below. n nIn the formulas, X 1 and X 2 are each independently a hydrogen atom, a hydroxyl group, a carboxyl group, a phosphate group, an alkyl group, an aryl group, an alkyl polyamine group, an alkyl polyphosphate group, an alkyl polycarboxylate group, an alkyl polyaminopolyphosphate group, or an alkyl polyaminopolycarboxylate group.
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