| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_71f36918b89097a4734940de546cfb45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28df8eb21e11c065bcd759183fe9e898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_764136af1ca4e5ac6295605d7ad32d3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2c82e4dc24a1678abe98fe09550cd5da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27562ace359200dce7274340b5c7c28b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a05bd06836199b7047f1c955261f9736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2a9f2f6053854f171ebba19f3748d70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbca6bf628ce95fb62fadfa02c120050
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b4af2fd89b1ab0d7d94b266842b47ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6caf8a12d27d2ccaefe95f1492a28ef6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B41-04 |
| filingDate |
2011-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5dabdb5dd3f65cc338db6635e1981126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee5d521b708d762aba6c8a8bc6083e44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03d6408bf366843a8b6063d0b8c19cac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2be6d44fb8b108cd6b9d9005aca178ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72db3d1e02dc544df16c1512d226752e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b4091091ba7e38595164f701b13fd03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec5a8fa66d6f99cff2155e4764d768d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c498c216d857508d96e43d3b00f8e54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a03ba9e62eac77b99b99e376cbf4b431 |
| publicationDate |
2014-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8831767-B2 |
| titleOfInvention |
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool |
| abstract |
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, a characteristic of a polishing pad, or a characteristic of a polishing tool are provided. One method includes scanning a specimen with a measurement device during polishing of a specimen to generate output signals at measurement spots on the specimen. The method also includes determining if the output signals are outside of a range of output signals. Output signals outside of the range may indicate that a parameter of the measurement device is out of control limits. In a different embodiment, output signals outside of the range may indicate damage to the specimen. Another method includes scanning a polishing pad with a measurement device to generate output signals at measurement spots on the polishing pad. The method also includes determining a characteristic of the polishing pad from the output signals. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9286930-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014242880-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015062746-A1 |
| priorityDate |
2002-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |