| abstract |
A system and method are presented for optical inspection of reticles bynsimulating the operation of a selected stepper. The system utilizes a flying spotninspection technique and includes a scanning apparatus and a detection unit. Thenscanning apparatus uses a laser source similar to that of the stepper of interest. Firstnand second light directing assemblies are accommodated in the optical paths of,nrespectively, incident and transmitted light, and are designed so as to providencoherence of the light substantially equal to that of the stepper. |