| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y35-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-04 |
| filingDate |
2003-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f030191058702fb57903489e443a659a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d4ee2ce742854c1ee57c09e388eabdf |
| publicationDate |
2006-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7086929-B2 |
| titleOfInvention |
Endpoint detection with multiple light beams |
| abstract |
A chemical mechanical polishing apparatus includes two optical systems which are used serially to determine polishing endpoints. The first optical system includes a first light source to generate a first light beam which impinges on a surface of the substrate, and a first sensor to measure light reflected from the surface of the substrate to generate a measured first interference signal. The second optical system includes a second light source to generate a second light beam which impinges on a surface of the substrate and a second sensor to measure light reflected from the surface of the substrate to generate a measured second interference signal. The second light beam has a wavelength different from the first light beam. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018330956-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006148383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010297916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8679979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011269377-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8579675-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9233452-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8010222-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010130100-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006131273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8831767-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10784113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8292693-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11691241-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7332438-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9199354-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9579767-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009130956-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9604339-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7780503-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10926378-B2 |
| priorityDate |
1999-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |