| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00415c6954d50881130756342023f349
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7bfd706326ccfc1a7727e0d815a1780f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f7c2343420baa5078c20ccf228cda843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aaffc067902782a0853d687a002b8fb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b70fa1992336095166455f3e341dc7f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2011-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37aa0f9ccad7afca6403af1f6b9240e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbdd607983aa7d86487a2a289ad53e1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4166662a220166f4f13b7321db2f63fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9790ee4175b39393129661cfa33e065d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_148c02e516a5d9ba449382dc30509f59 |
| publicationDate |
2014-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8703581-B2 |
| titleOfInvention |
Water soluble mask for substrate dicing by laser and plasma etch |
| abstract |
Methods of dicing substrates having a plurality of ICs. A method includes forming a mask comprising a water soluble material layer over the semiconductor substrate. The mask is patterned with a femtosecond laser scribing process to provide a patterned mask with gaps. The patterning exposes regions of the substrate between the ICs. The substrate is then etched through the gaps in the patterned mask to singulate the IC and the water soluble material layer washed off. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224625-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10607846-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013299088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10796960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10923362-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9620379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016035577-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10043676-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015287638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9793132-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10763124-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076860-B1 |
| priorityDate |
2011-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |