http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8500912-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c430a0057e1ea5f34371214016160915 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate | 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd9d44ba1caf04a1cfeaaf8d2e0c825c |
| publicationDate | 2013-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8500912-B2 |
| titleOfInvention | Plasma processing method and plasma processing apparatus |
| abstract | Provided is a plasma processing method capable of removing a Ti-series deposit from the surface of a processing chamber of a plasma processing apparatus without production of a foreign matter such as a boron oxide. The plasma processing method includes carbon-series deposition discharge which succeeds product etching during which a sample containing a Ti material is processed, and during which a carbon-series film is deposited on a Ti reaction by-product deposited on the surface of the processing chamber, and chlorine-series discharge which succeeds the carbon-series deposition discharge and during which the carbon-series film and Ti that are deposited on the surface of the processing chamber are removed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10375901-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10674681-B2 |
| priorityDate | 2010-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.