| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f731a389160b4e7875bf867a64df238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_594649ce4bd5d625409f9e0102d656ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49044ad734cfddc869a7e5eb9affeefa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 |
| filingDate |
2010-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dde75839b324498c045523ff4b934cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55bc81e89e41cf3fdaa0b2f73760b9ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cb2edcc8a77f2d138fb523eabc9d6f9 |
| publicationDate |
2013-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8431329-B2 |
| titleOfInvention |
Self-aligned spacer multiple patterning methods |
| abstract |
Self-aligned spacer multiple patterning method are provided. The methods involve alkaline treatment of photoresist patterns and allow for the formation of high density resist patterns. The methods find particular applicability in semiconductor device manufacture. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10216090-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8593001-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11493846-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9768025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8889561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11145551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9761489-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11069528-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304744-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019355625-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020020540-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643895-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615988-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9330931-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016291462-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9852917-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10763118-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9105510-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9773672-B2 |
| priorityDate |
2009-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |