Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
filingDate |
2010-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c976cd4fa4872cb72576567b4689919 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5609cc41201c1746aaf0ba338d67026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a3859d42c5414565a3144351d52a7e |
publicationDate |
2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2010330499-A1 |
titleOfInvention |
Methods of forming electronic devices |
abstract |
Methods of forming electronic devices are provided. The methods involve alkaline treatment of photoresist patterns and allow for the formation of high density resist patterns. The methods find particular applicability in semiconductor device manufacture. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010330498-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8507185-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9715724-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8338083-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8338079-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8394571-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8431329-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8877432-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011008729-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010330501-A1 |
priorityDate |
2009-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |