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publicationDate 2013-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8377325-B2
titleOfInvention Etchant for metal wiring and method for manufacturing metal wiring using the same
abstract Exemplary embodiments of the present invention provide a metal wiring etchant. A metal wiring etchant according to an exemplary embodiment of the present invention includes ammonium persulfate, an organic acid, an ammonium salt, a fluorine-containing compound, a glycol-based compound, and an azole-based compound.
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