| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5374d89211a177c8fa41618b2db6404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4efee27937b4a512f45809fed5293747
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_812e91e5dac2c77812edbd0ca4de65a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ba358a2c01c043fd6edb9c4f045800d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8a2d8832786cec9f54b7a47f92f370e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a67dc3ece37e5f048c71975388f130d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a69b3fd6d6d61f7900637fa135d3cd73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37e31f45c3c1be001a8209b18b16fcf6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-21 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67313
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 |
| filingDate |
2009-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51a3baf990d97d0bf07703c312405220
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1322ef33058653014ce4887ebecdad1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa2f4069df5e3b1df4d86a2e6b774130
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62acccdbd9dbbfc04d97c0e88be50525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29e41c4358849c9f6acee7f8f6fbc1f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25276805a4d2a168ecb774eb2f1c47d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03528871c973bd67698a9a0de659fb2b |
| publicationDate |
2012-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8309464-B2 |
| titleOfInvention |
Methods for etching the edge of a silicon wafer |
| abstract |
The present disclosure generally relates to the manufacture of silicon wafers, and more particularly to edge etching apparatus and methods for etching the edge of a silicon wafer. |
| priorityDate |
2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |