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publicationDate 2009-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009242126-A1
titleOfInvention Edge etching apparatus for etching the edge of a silicon wafer
abstract The present disclosure generally relates to the manufacture of silicon wafers, and more particularly to edge etching apparatus and methods for etching the edge of a silicon wafer.
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