| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2003-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a57c1d94ba4a0113d2e1836aff75f6f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f58a98639944ef8e55cb6547bdf3ac2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83438220b211dfd7b398ed87149938ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_257e433685bdefc11878a1f64a1d0c00 |
| publicationDate |
2008-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7314766-B2 |
| titleOfInvention |
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus |
| abstract |
A treatment method of a semiconductor wafer includes treating the semiconductor wafer in a first solution having at least one kind of an oxidative acid and an oxidizing agent and treating the semiconductor wafer in a second solution having at least one of HF and NH 4 F. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110618132-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361454-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398725-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015024520-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010207040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7953511-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9431348-B2 |
| priorityDate |
2002-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |