| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bd4720aefb28835b9bfc5ff805f891b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-014 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00 |
| filingDate |
2004-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_962c1f94a3c784de8d3c53e495334178 |
| publicationDate |
2006-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7128843-B2 |
| titleOfInvention |
Process for fabricating monolithic membrane substrate structures with well-controlled air gaps |
| abstract |
A process for fabricating monolithic membrane structures having air gaps is disclosed, comprising the steps of: providing a wafer; depositing and patterning a protective layer on the wafer; providing a trench in the wafer; depositing and patterning a metal in the trench; depositing and patterning a sacrificial layer on the metal; depositing and patterning a membrane pad on the sacrificial layer; providing a polymeric film on the protective layer and sacrificial layer, wherein part of the polymeric film has a tensile stress; and releasing part of the polymeric film from the protective layer and sacrificial layer, wherein the tensile stress of a portion of the polymeric film releases the portion of the polymeric film from the wafer and generates the air gap. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9156685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018534135-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8987845-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495607-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018374861-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017075598-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10668436-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014131818-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015191350-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016086960-A1 |
| priorityDate |
2003-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |