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publicationDate 2004-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6815333-B2
titleOfInvention Tri-layer masking architecture for patterning dual damascene interconnects
abstract This invention relates to a method of dual damascene integration for manufacture of integrating circuits using three top hard mask layers having alternating etch selectivity characteristics.
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