| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-114 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2001-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0323cc0f8744d02afb65c1585dd8546a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1adbd34d713b510fad2a85f69dd3c187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ce51c74bac8acbf1befc9d435ca3676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12e54befea21c905c0a5610502e28ff7 |
| publicationDate |
2004-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6803169-B2 |
| titleOfInvention |
Photoresist compositions comprising blends of photoacid generators |
| abstract |
The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2216684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8460851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10539873-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10248020-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7749678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004197698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2216683-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2261738-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8921028-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7005231-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011171576-A1 |
| priorityDate |
1999-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |