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publicationDate 2004-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6703132-B1
titleOfInvention Magnetoresistance sensor element and method of fabricating the magnetoresistance element
abstract The invention provides a sensor element having a sensor substrate and a flat sensor portion supported by the sensor substrate in which the surface of the flat sensing portion is covered with a silicone resin film. The silicone resin film is excellent in step coverage of the flat sensing portion, having low stress applied to the sensing portion, can be formed at low temperature and can prevent the sensing portion from being effected with adverse influence even in the fabrication steps.
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