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publicationDate 2002-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6383065-B1
titleOfInvention Catalytic reactive pad for metal CMP
abstract A polishing pad including a polishing pad substrate and a catalyst having multiple oxidation states wherein the catalyst containing polishing pad is used in conjunction with an oxidizing agent to chemically mechanically polish metal features associated with integrated circuits and other electronic devices.
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