| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24628 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08 |
| filingDate |
2004-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f9bd72646f08560a1b8b43659ce2afa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10aec23efdd75f1bddfbcd99d3ebe059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c44f590f393448f635036e2e56cf0159
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_065679a83f970d8513f22a35164642ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbd8a81fc3c41ff267050ab4e7bdfc02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74da95b44bd71fcea5f926c3c5c0c07c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a3ccf05d6a3861a88862fc2bdffc659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6edc9567decd14645746d81baf8aa19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46529ed1a64157408c9d3e3374b2ae94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66b76c92997b9ea1272f85c42f5deb65 |
| publicationDate |
2004-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004266327-A1 |
| titleOfInvention |
Conductive polishing article for electrochemical mechanical polishing |
| abstract |
An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface. A plurality of perforations may be formed in the polishing article for flow of material therethrough. In another aspect, a polishing article for polishing a substrate includes a body having a polishing surface and a conductive element disposed therein. The conductive element may have a contact surface that extends beyond a plane defined by the polishing surface. The polishing surface may have one or more pockets formed therein. The conductive element may be disposed in each of the polishing pockets. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005153633-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670468-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003173659-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007190911-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7097536-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005032464-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109108800-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008220702-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008003935-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006003670-A1 |
| priorityDate |
2000-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |