| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00e5a9d1a19d3cc2a0fbfd2897f0de92 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-358
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
| filingDate |
1997-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36d9f8d301158a1920c1fb265a82ca67 |
| publicationDate |
2002-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6361661-B2 |
| titleOfInvention |
Hybrid coil design for ionized deposition |
| abstract |
A sputtering hybrid coil for a plasma chamber in a semiconductor fabrication has an enhanced sputtering surface and an internal coolant carrying channel thermally coupled to the sputtering surface to cool the sputtering surface and the coil. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004018740-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2405480-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2405480-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7513971-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7015692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398832-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005030028-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728135-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004256217-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006070875-A1 |
| priorityDate |
1997-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |