| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-3021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 |
| filingDate |
1999-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdcf4aec9aca0387eb14db2abc2d7452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b99b0c31b81e195b6698f2aec7b0b50c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7efb4f4d1965a5b83c13fcac8ab37c3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81a1770846e8bdbf9f1a27e7002ad63f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf08948a95ccda835b394803ad8a34d0 |
| publicationDate |
2001-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6270949-B1 |
| titleOfInvention |
Single component developer for copolymer resists |
| abstract |
A method for developing copolymer photosensitive resists wherein a single solvent is used in conjunction with a puddle develop tool. The copolymer resist is ZEP 7000 and the developer is ethyl 3-ethoxy propionate (EEP). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9324655-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8921167-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003196986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6793836-B2 |
| priorityDate |
1998-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |