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titleOfInvention Method of forming semiconductor thin film and method of fabricating solar cell
abstract A silicon thin film is formed by coating on a substrate a solution of polysilane represented by the general formula --(SiR 1 2 ) n --, where R 1 substituents are selected from the group consisting of hydrogen, an alkyl group having two or more carbon atoms and a β-hydrogen, a phenyl group and a silyl group, and thermally decomposing the polysilane to deposit silicon.
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