patent/US-5633506-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5633506-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa1b9ebfcd0a9eea7ab4f03b347cfb5c
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
filingDate	1995-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1997-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c23ec15ba5bf8607d08eae21d4c489ca
publicationDate	1997-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5633506-A
titleOfInvention	Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses
abstract	Method and apparatus are provided for removal of contaminant material adhered to interior surfaces of an ion beam neutralization apparatus and ion implantation apparatus of an ion beam implanter. Contaminant material is removed from the neutralization apparatus and the implantation apparatus using a plasma glow discharge. The contaminant material is also removed from the neutralization apparatus by expanding the ion beam.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007262262-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002162967-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006131514-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006097645-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007241689-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-87109-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6462332-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113663988-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6559462-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410844-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006047373-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053747-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7820981-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100426446-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009095713-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007278417-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732787-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9991095-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495434-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017092473-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I394196-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11320399-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10522330-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008223409-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6259105-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723700-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008073559-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008087219-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6221169-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008047607-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7819981-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007194230-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7834554-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10730082-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009081874-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005274910-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113663988-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018166261-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005016838-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010084582-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008121811-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018111171-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7838842-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7078689-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7629590-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7078710-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009014644-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6992311-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11037758-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8092641-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7875125-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006086376-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7173260-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006078526-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6093625-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003956-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5959305-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8603252-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010096568-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7026611-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008518482-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107690689-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107690689-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007210260-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7947129-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016365225-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6576909-B2
priorityDate	1995-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4665315-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5427621-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4022928-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0648861-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5554854-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0140975-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559586 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6337058

Total number of triples: 102.