| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9fc0a00eab3a757e8324b1e887d7ba97 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02549
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
1994-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d49b91f79205f71985564dfa19c4efd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b11be2898ee2aabd3b38cb97798463b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d51e90154a3a04c7d5692a115adae2d5 |
| publicationDate |
1995-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5478437-A |
| titleOfInvention |
Selective processing using a hydrocarbon and hydrogen |
| abstract |
A layer is plasma etched or deposited with a gaseous mixture of a hydrocarbon, hydrogen and a noble gas. A cathode DC bias of greater than 600 V is used. This cathode DC bias allows for selectively etching a III-V material over an aluminum containing layer or for the deposition of a hydrogenated carbon film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0822584-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6716758-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0822584-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006105577-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6417013-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003038106-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6261962-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004161941-A1 |
| priorityDate |
1994-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |