| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823425 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2004-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57675cd159c1b235477cbf80e1f387f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0461388afad412776b419830be30467e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8d306f51b5f3f03c8a9a20c43c863e0 |
| publicationDate |
2004-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004161941-A1 |
| titleOfInvention |
Aspect ratio controlled etch selectivity using time modulated DC bias voltage |
| abstract |
A modulated bias power etching method for etching a substrate is disclosed. The method alternatively deposits and etches material from a low aspect area of an integrated circuit device to form a static area while etching material from a high aspect area. The modulation pulse period and repetition rate are adjusted to permit deposition at low aspect ratio and very little or no deposition at high aspect ratio during the deposition cycle and to permit etching of the material deposited on the low aspect ratio area and etching of the material in the high aspect ratio area during the etching cycle. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110493-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7959819-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8847205-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005287815-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104752331-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005103441-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010099271-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014011302-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023164251-A1 |
| priorityDate |
1999-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |