http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5476750-A

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filingDate 1992-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1995-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c80fd5ec6ceb8664cdf3bbe386715869
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publicationDate 1995-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5476750-A
titleOfInvention Metal ion reduction in the raw materials and using a Lewis base to control molecular weight of novolak resin to be used in positive photoresists
abstract The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metal ions and a substantially consistent molecular weight. A method is also provided for producing photoresist composition from such novolak resins and for producing semiconductor devices using such photoresist compositions.
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