http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9312152-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03627f82d4edc6567f9627df6efdde5d
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-08
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-08
filingDate 1992-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eed0ec386294b8ecf35ee16c335a6d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_522dcc9ae8bf04672ff3b0cfc51b3341
publicationDate 1993-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-9312152-A1
titleOfInvention Metal ion reduction in novolak resins
abstract The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metal ions, utilizing treated ion exchange resins. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5472616-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5500127-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9700465-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5858627-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5939511-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5443736-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6200479-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5516886-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5656413-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5521052-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5665517-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9415262-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9612214-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9412912-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9414862-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5543263-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9414863-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5679766-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9621176-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5580700-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5739265-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5580949-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9711101-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9711929-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9711100-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9712281-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9725359-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5936071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5702611-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1092176-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5962183-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5750031-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5688893-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6048665-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5693749-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9621175-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5789522-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5350714-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5976761-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5525315-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5614352-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5830990-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5476750-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5624789-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5837417-A
priorityDate 1991-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4033909-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5073622-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID342
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22323558
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127420890
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129214490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129943330
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID938
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID737157
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7765
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405794
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21282403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411153
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405493
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127990989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID919792
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21797394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54529426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128716601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128435415
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8150
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127774471
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226470154
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID415282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226442564
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7267
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129313946
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3029620
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226440720
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8295
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226470120
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7771
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23358315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415973
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID735923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6954
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID172281
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129519771
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128379611
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11294
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID234364685
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226471150
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129853967
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID234364691
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400163
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129653859
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128562115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226427114
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226558569
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127465551
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31272
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11105
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226425017
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415608
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226401477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19981554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53249235
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17407
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22674037
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID63075333
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413822
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411154
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399864
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127396081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226427115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226427113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405985

Total number of triples: 154.