patent/US-5286606-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5286606-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03627f82d4edc6567f9627df6efdde5d
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate	1992-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1994-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eed0ec386294b8ecf35ee16c335a6d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_522dcc9ae8bf04672ff3b0cfc51b3341
publicationDate	1994-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5286606-A
titleOfInvention	Process for producing a developer having a low metal ion level
abstract	The present invention provides a process for producing a developer containing a surfactant which contains a very low level of metal ions and a process for developing light sensitive photoresist compositions, using such a developer, to produce semiconductor devices.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5830990-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6048665-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5936071-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5516886-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0223598-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6174501-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0223598-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5521052-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005143270-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5688893-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5665517-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9712281-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5750031-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5656413-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100470514-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5476750-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5624789-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6531267-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5523194-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5594098-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11256173-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5962183-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5614352-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5580700-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5858627-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1105129-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5837417-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7192910-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5580949-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0685767-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233921-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9712280-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5543263-A
priorityDate	1992-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4784937-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4833067-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5175078-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4914006-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6472155-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127534723 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24773

Total number of triples: 54.