| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-151 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095 |
| filingDate |
1984-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1986-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2026d143a6e69f4735fe646a6938e8a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8bae4a666574c6dfa2324f5bfc43b17 |
| publicationDate |
1986-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4578344-A |
| titleOfInvention |
Photolithographic method using a two-layer photoresist and photobleachable film |
| abstract |
A photobleachable layer has been found to improve the resolution limits of two-layer photoresists for making integrated circuits. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7897296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8664289-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005079454-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4623611-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785989-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003219681-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007178711-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5178978-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7964503-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008076060-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011215387-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9307629-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6864039-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6440643-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8607473-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6294317-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5002993-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008311528-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8323866-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4863827-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014300877-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7622246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010021843-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9454086-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006078802-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4816380-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003003326-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10095115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7432197-B2 |
| priorityDate |
1984-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |