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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
filingDate 1989-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1991-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66274a6e7b5c6f64a7fa4e364390fe9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e56f238638fcebed00f59f0d69253c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f837f32ed6b87a09e7a07baa942177c4
publicationDate 1991-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5002993-A
titleOfInvention Contrast enhancement layer compositions, alkylnitrones, and use
abstract Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.
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