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publicationDate 1985-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4557943-A
titleOfInvention Metal-silicide deposition using plasma-enhanced chemical vapor deposition
abstract A method for deposition of thin conductive layers of low resistivity titanium silicide. The method comprises the co-deposition of titanium and silicon by plasma-enhanced chemical vapor deposition at a low temperature. An anneal above the deposition temperature reduces the layer resistivity, making the layer especially suitable for microelectronic applications.
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