| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b312503d5fb78f9d7d78c88940a1558c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate |
1987-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47a961594158fd0be63caf8028c37f25 |
| publicationDate |
1987-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0245934-A2 |
| titleOfInvention |
Low pressure chemical vapor deposition of metal silicide |
| abstract |
The invention relates to a process for the low pressure chemical vapor deposition (LPCVD) of metal silicide, especially molybdenum silicide, on a substrate at a low temperature. The walls of a LPCVD reactor which contains a heated pedestal for holding a substrate are cooled and the pedestal is heated so the substrate temperature reaches a desired level, depending on the metal silicide to be deposited. A metal halide and a silane or disilane are fed separately into the deposition chamber and mixed behind a small baffle plate at the entrance. The metal silicide is deposited on the substrate surface. It is preferred that the substrate be pre-treated with Hâ‚‚ plasma before deposition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0363065-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0363065-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5180432-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1069207-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1069207-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0437110-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5391394-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0437110-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4871691-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0443277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4957777-A |
| priorityDate |
1986-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |