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publicationDate 1983-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4397937-A
titleOfInvention Positive resist compositions
abstract Positive resists are formed from a soluble phenolic resin and a sensitizer which is a diester of a 1-oxo-2-diazonaphthalene sulfonic acid and of an unsymmetrical primary or secondary aliphatic diol which is a mixture of geometric and diastereoisomers.
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