| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 |
| filingDate |
1989-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1990-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aab5e4f899ea6f5f1505a04be8cd43f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3ad8f53dc4f4dddedbbc0585544db85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a8ae834254dff46e25812f25d054c23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee286f174c1aad3ec90e7751c93a2355 |
| publicationDate |
1990-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4942108-A |
| titleOfInvention |
Process of making diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers |
| abstract |
The dissolution rate in alkaline developer solutions of image-wise exposed photoresist systems based on diazoquinone sensitized polyamic acid is reduced to prepare relief images of fine line resolution by reducing the acidity of the polyamic acid prior to exposure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5320935-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5114826-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5310625-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02088845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011059397-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004096773-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157204-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5442024-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6927274-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5342739-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8758976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5348835-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004127595-A1 |
| priorityDate |
1985-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |