Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03627f82d4edc6567f9627df6efdde5d |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
filingDate |
1990-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1991-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7179c7fa49d541debec6daf62558789f |
publicationDate |
1991-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-5066561-A |
titleOfInvention |
Method for producing and using a positive photoresist with o-quinone diazide, novolak, and propylene glycol alkyl ether acetate |
abstract |
The invention provides a method for producing a positive working photosensitive element with increased photospeed which comprises coating a formulation containing at least one novolak or polyvinyl phenol resin, at least one o-quinone diazide and a propylene glycol alkyl ether acetate on a substrate, drying, exposing to imaging energy and developing. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5595861-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5336587-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5587267-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5725903-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5964951-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6136498-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6383712-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6114086-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2666175-C1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9723808-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5853947-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5629135-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5554486-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9723808-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5916729-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5543265-A |
priorityDate |
1984-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |