| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4761369485699b9ca27e2cb1fbe8aec |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 |
| filingDate |
1974-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1976-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37a628b698fa0559844db57eb0404434 |
| publicationDate |
1976-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3930913-A |
| titleOfInvention |
Process for manufacturing integrated circuits and metallic mesh screens |
| abstract |
A process step for use in the manufacture of thin film integrated circuits, hybrid circuits and fine metallic mesh screens, to enable the removal of all organics and photoresist material from underlying metallic films without concomitant degradation of the metallic surface. After etching of preselected portions of an underlying critical metallic surface, the material is exposed to a low pressure (few torr) rf generated "cold" plasma, where the plasma is a homogeneous gaseous mixture of oxygen and nitrogen. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4172004-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007155161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6030901-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4243865-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3975252-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4343677-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4012307-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8002353-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4222337-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6705003-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4787957-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0123813-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0123813-A3 |
| priorityDate |
1974-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |