| abstract |
A PHOTOPOLYMERIZABLE COMPOSITION COMPRISING 100 PARTS BY WEIGHT OF PHOTOPROPYLTRICHLORSILANE AND SILOXANE MADE FROM Y-ACRYLOXYPROPYLTRICHLORSILANE AND DIHYDROXYDIMETHYLPOLYSILOXANE, 4 PARTS BY WEIGHT OF 4,4''BIS(DIMETHYLAMINO)BENZOPHENON, AND 1,000 PARTS BY WEIGHT OF A SOLVENT IS APPLIED OVER A BASE PLATE, AND THEREON A POSITIVE PATTERN IS LAID. FROM ABOVE THE POSITIVE PATTERN A LIGHT IS SUPPLIED TO CARRY OUT DEVELOPING AND FIXING TREATMENTS AND SUBSEQUENTLY ION-ETCHONG TO FINALLY OBTAIN ETCHED PRODUCTS HAVING FINE PATTERNS WITH LITTLE SIDE-ETCHING PHENOMENON. |