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filingDate 2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019165114-A1
titleOfInvention Semiconductor device and method of manufacturing the same
abstract Disclosed are semiconductor devices and methods of manufacturing the same. The semiconductor device comprises a gate electrode on a substrate, an upper capping pattern on the gate electrode, and a lower capping pattern between the gate electrode and the upper capping pattern. The lower capping pattern comprises a first portion between the gate electrode and the upper capping pattern, and a plurality of second portions extending from the first portion onto corresponding side surfaces of the upper capping pattern. The upper capping pattern covers a topmost surface of each of the second portions.
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